Date of Publication :18th January 2018
Abstract: With the rapid development of cellular network technology of the fifth generation (5 G), future sensors and microelectromechanical systems (MEMS)/Nanoelectromechanical systems (NEMS) are playing an increasingly critical role in the provision of information in our daily lives. This review paper presents the trends and perspectives of future MEMS Acoustic sensors in development. This paper presents a review of MEMS devices based on acoustic wave which provide a promising technology platform for the development of sensitive, portable, real-time sensors. MEMS manufacture of acoustic wave based sensors allows for miniaturization of devices, reduction of power consumption and integration with electronic circuits. Film bulk acoustic wave resonators (FBAR), surface acoustic wave resonators (SAW) and SAW delay lines are the acoustic wave based MEMS devices reported in the literature and presented in this review. Different approaches to realization of FBARs, SAW resonators, and SAW delay lines are presented for different biochemical applications. Methods for integrating the acoustic wave MEMS devices intomicrofluidic systems and strategies for functionalization will also be discussed
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