Date of Publication :23rd May 2017
Abstract: Inter digital on-chip micro-super capacitors were manufactured and tested based on Carbide Derived Carbon (CDC) films. A titanium carbide (TiC) film was patterned and chlorinated to produce a TiC related carbon (TiCeCDC) sheet, accompanied by two forms of current collectors (Ti / Au and Al) deposition utilizing normal micro-manufacturing processes. CDC-based micro-super capacitors used a 1 M tetraethyl ammonium tetra fluoroborate, NEt4BF4, in propylene carbonate (PC) electrolyte were electrochemically characterized by cyclic voltammetry and impedance spectroscopy. A device capacity of 0.78 mF and 1.5 mF cm the specific footprint capacity of the device was measured at 100 mV s for a potential range of 2 V. A specific 3.0 mJ cm energy And 84 mW cm of specific power for the devices were calculated. Such instruments provide a mechanism by micro-manufacturing to produce pure carbon-based micro super capacitors and can be used to drive micro-electromechanical systems (MEMS) and electronic devices.
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